SIMS 4550

Quadrupole SIMS Microprobe for dopant depth profiling and thin layer analysis in semiconductors.

The CAMECA SIMS 4550 offers extended capabilities for ultra shallow depth profiling, trace element and composition measurements of thin layers in Si, high-k, SiGe and other compound materials such as III-V for optical devices.

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High depth resolution and high throughput

With ever shrinking device dimensions, the implant profiles and layer thickness of today’s semiconductors are often in the range of 1-10nm. The SIMS 4550 has been optimized to address these application fields by offering oxygen and cesium high density primary beam with an impact energy programmable from 5keV down to less than 150eV.

http://www.cameca.com/instruments-for-research/index.aspx

Enquiry Email: webenquiry@wirsam.com

Brand

Cameca

From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a manufacturer of movie theater projectors, and soon the CAMECA products evolved into scientific instrumentation. Since pioneering Electron Probe MicroAnalysis (EPMA) in the 1950's and Secondary Ion Mass Spectrometry (SIMS) in the 1960's, CAMECA has remained the undisputed world leader in these techniques while achieving numerous breakthrough innovations in complementary techniques such as Low energy Electron induced X-ray Emission Spectrometry (LEXES), and 3D Atom Probe. CAMECA has evolved from a manufacturer of scientific instrumentation for the international research community to a provider of in-fab and near-fab metrology solutions for the semiconductor manufacturing industry. Today, CAMECA employs over 300 employees around the world, with locations in the USA, Germany, Japan, Korea, China, and Taiwan, and a wide network of agents, ensuring the best level of support to all users. Our mission is to focus on instrumental development to offer our customers the highest analytical performance in their specialized characterization fields. CAMECA is headquartered in Gennevilliers near Paris, France. Our plant is a state-of-the-art facility with clean room environment, electron and ion optics simulation, advanced CAD, UHV cleaning... Operating under ISO 9001 certification, CAMECA controls not only the technology, but all aspects in the designing, manufacturing, installing and servicing of its products. In 2007, CAMECA joined AMETEK, Inc., a leading global provider of electronic instruments and electromechanical devices, as part of the AMETEK Materials Analysis Division.

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