NanoSIMS 50L

SIMS Microprobe for Isotopic and Trace Element Analysis at High Spatial Resolution

The CAMECA NanoSIMS 50L is a unique ion microprobe optimizing SIMS analysis performance at high lateral resolution. It is based on a coaxial optical design of the ion gun and the Secondary ion extraction, and on an original magnetic sector mass analyzer with multicollection.

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Unique features

The NanoSIMS 50L delivers simultaneously several key performances that can only be obtained individually with any other known instrument or technique:
- High analysis spatial resolution (down to 50 nanometers),
- High sensitivity (ppm in element imaging),
- High Mass Resolution (M/dM),
- Parallel acquisition of seven masses,
- Fast acquisition (DC mode, not pulsed),
- Analysis of electrically insulating samples without problem.
And thanks to recent improvements, isotope ratio reproducibility of a few tenths of permilcan now be achieved.

http://www.cameca.com/instruments-for-research/index.aspx

Enquiry Email: webenquiry@wirsam.com

Brand

Cameca

From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a manufacturer of movie theater projectors, and soon the CAMECA products evolved into scientific instrumentation. Since pioneering Electron Probe MicroAnalysis (EPMA) in the 1950's and Secondary Ion Mass Spectrometry (SIMS) in the 1960's, CAMECA has remained the undisputed world leader in these techniques while achieving numerous breakthrough innovations in complementary techniques such as Low energy Electron induced X-ray Emission Spectrometry (LEXES), and 3D Atom Probe. CAMECA has evolved from a manufacturer of scientific instrumentation for the international research community to a provider of in-fab and near-fab metrology solutions for the semiconductor manufacturing industry. Today, CAMECA employs over 300 employees around the world, with locations in the USA, Germany, Japan, Korea, China, and Taiwan, and a wide network of agents, ensuring the best level of support to all users. Our mission is to focus on instrumental development to offer our customers the highest analytical performance in their specialized characterization fields. CAMECA is headquartered in Gennevilliers near Paris, France. Our plant is a state-of-the-art facility with clean room environment, electron and ion optics simulation, advanced CAD, UHV cleaning... Operating under ISO 9001 certification, CAMECA controls not only the technology, but all aspects in the designing, manufacturing, installing and servicing of its products. In 2007, CAMECA joined AMETEK, Inc., a leading global provider of electronic instruments and electromechanical devices, as part of the AMETEK Materials Analysis Division.

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