IMS 7-Auto

CAMECA’s universal SIMS: reference detection sensitivity with high throughput & full automation

The IMS 7f-Auto is the latest version of our successful IMS xf Secondary Ion Mass Spectrometer product line. Designed to deliver ultimate precision elemental and isotopic analyses with increased ease-of-use and productivity, it has been optimized for challenging applications such as glass, metals, ceramics, Si-based, III-V and II-VI devices, bulk materials, thin films… fulfilling industry requirements for efficient device development and process control.

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Key analytical features for solving a wide range of analytical problems

The IMS 7f-Auto offers unparalleled depth profiling capabilities with high depth resolution and high dynamic range. The high transmission mass spectrometer is combined with two reactive, high-density ion sources, O2+ and Cs+, thus providing high sputter rate and excellent detection limits. A unique optical design allows both direct ion microscopy and scanning microprobe imaging.

Improved automation & operation efficiency

The IMS 7f-Auto is equipped with a redesigned, in-line primary column for easier and faster primary beam tuning and optimized primary beam current stability. New automated routines for both primary and secondary column tuning minimize operator related biases and improve ease-of-use. A motorized storage chamber with automated load / unload of sample holders ensures high throughput through analysis chaining and remote operation.

http://www.cameca.com/products/sims/ims7f-auto

Enquiry Email: webenquiry@wirsam.com

Brand

Cameca

From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a manufacturer of movie theater projectors, and soon the CAMECA products evolved into scientific instrumentation. Since pioneering Electron Probe MicroAnalysis (EPMA) in the 1950's and Secondary Ion Mass Spectrometry (SIMS) in the 1960's, CAMECA has remained the undisputed world leader in these techniques while achieving numerous breakthrough innovations in complementary techniques such as Low energy Electron induced X-ray Emission Spectrometry (LEXES), and 3D Atom Probe. CAMECA has evolved from a manufacturer of scientific instrumentation for the international research community to a provider of in-fab and near-fab metrology solutions for the semiconductor manufacturing industry. Today, CAMECA employs over 300 employees around the world, with locations in the USA, Germany, Japan, Korea, China, and Taiwan, and a wide network of agents, ensuring the best level of support to all users. Our mission is to focus on instrumental development to offer our customers the highest analytical performance in their specialized characterization fields. CAMECA is headquartered in Gennevilliers near Paris, France. Our plant is a state-of-the-art facility with clean room environment, electron and ion optics simulation, advanced CAD, UHV cleaning... Operating under ISO 9001 certification, CAMECA controls not only the technology, but all aspects in the designing, manufacturing, installing and servicing of its products. In 2007, CAMECA joined AMETEK, Inc., a leading global provider of electronic instruments and electromechanical devices, as part of the AMETEK Materials Analysis Division.

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