CAMECA's new generation Shallow Probe: the metrology solution for advanced integration of new processes.
Front-end semiconductor compositional metrology solution for 22nm node and beyond
CAMECA's EX-300 is a unique LEXES based metrology tool supporting major semiconductor developments since the 90nm node era and following up the integration of the most diverse materials. It accelerates the time-to-market of your logic and memory devices and increases the integrated yield of your high volume production.
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